Piezoelectrically driven silicon beam force sensor
نویسندگان
چکیده
منابع مشابه
Resonating Silicon Beam Force Sensor
A resonating silicon-beam force sensor is being developed using micromachining of silicon and IC-compatible processes. Results are reported here of measurements on the force-to-frequency transfer of bare silicon prototypes. The measurements with forces on the sensor beam up to 0.4 N show a frequency shift of 3.1 to 5.2 times the unloaded resonance frequency f. (fo = 3 to 5 kHz), depending on th...
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An important design consideration in the development of two-port resonant sensors is the electrical cross-talk between the input port and the output port. The overall transfer function if(jo) of the two-port sensor is equal to the vectorial sum of a transfer function representing the mechanical behavior and a transfer function representing the electrical cross-talk. The resonant silicon beam fo...
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 1991
ISSN: 0924-4247
DOI: 10.1016/0924-4247(91)87019-y